Small Area R&D Microwave Plasma CVD Systems
Small Area R&D Microwave Plasma CVD Systems
Low-cost, manually-controlled entry systems with 1" deposition area:
- Easy to use, small in size
- Quartz bell jar chamber
- Reactor kit available (for user custom integration)
- Heater kit (optional with up to 850C max. temperature)
- Operating Pressure range: 10-50 Torr