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1.5–5.0 kW — SDS 5000/6000 Series Microwave Plasma CVD Systems

1.5–5.0 kW — SDS 5000/6000 Series Microwave Plasma CVD Systems

This series of advanced diamond CVD systems provides many important features and advantages:

  • Low- to high-power density plasma for accelerated diamond CVD growth rates
  • Flexible configurations for demanding polydiamond and single crystal processes
  • Stainless, cold-wall chamber
  • Heated and/or cooled stage
  • Multiple ports for plasma viewing and in-situ diagnostics, load-lock capable
  • Range of models available for recipe-driven computer control and manual operation