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SDS 6K 6 kW Microwave Plasma CVD System

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SDS 6K 6 kW Microwave Plasma CVD System

Newest system for gem, tool and poly diamond production

  • Excellent process stability and repeatability
  • Operable in low- to high-power density plasma for accelerated growth rates
  • Unique temperature control capabilities at high power densities
  • Wide pressure operating range: 10-200 Torr
  • Clamshell lid for easy-access substrate placement and chamber cleaning
  • Recipe-driven automatic, semiautomatic and manual control