ATHENA
Online 3D fully automatic optical inspection system
Key Features
- 8+4 projection+3 layers of 2D light source
- 2D and 3D simultaneous detection algorithms
- Telecentric lens provides high-precision detection
- High-configuration CPU is enough to ensure fast image processing
- Simple and clear user interface
- Built-in standard component library management system
- Offline real-time debugging system (option)
Specifications
Equipment type | ATHENA | ATHENA L | ATHENAL D | ATHENADL |
Detection grate method | 2D: Visual inspection algorithm 3D: PMP phase shift technology (Moiré fringe) | |||
camera pixels | 10 million. 12 million | |||
×/Y resolution | 10um. 15um. 18um | |||
Maximum substrate size | 330*330mm | 510×510mm | DL:330*280mm SL:330*500mm | DL: 5 1 0 * 3 3 0 mm SL:510*600mm |
Minimum substrate size
| 50*50mm | |||
Substrate thickness |
0.4-7 mm | |||
Component clear height | Above: 50mm Below: 50 mm | |||
Component height | 0-5.5m (optional 27mm. ZAxis) | |||
Board curvature | ‡3mm | |||
Motor type | X/Y linear motor | |||
Device power supply | Single phase AC 220-240Vac, 50/60Hz | |||
Remark | ATHENA supports ultra-long substrate processing capabilities (up to 1.2 m long substrates can be processed) | |||